Hot-wire CVD based SiN films for linear and nonlinear photonics device applications
K Furusawa, Y Yamashita, K Aoki, N Sekine… - Advanced Solid State …, 2018 - opg.optica.org
K Furusawa, Y Yamashita, K Aoki, N Sekine, A Kasamatsu, Y Uzawa
Advanced Solid State Lasers, 2018•opg.optica.orgHot-wire CVD based SiN films for linear and nonlinear photonics device applications … Hot-wire
CVD based SiN films for linear and nonlinear photonics device applications …
CVD based SiN films for linear and nonlinear photonics device applications …
Abstract
Optical properties of SiN photonic devices based on the hot-wire chemical vapor deposition (HWCVD) method are reported. Microring resonators exhibiting their quality factors in excess of 10 5 were successfully demonstrated in the telecommunication L band.
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