Regional Bandgap Tailoring of 1550 nm‐Band InAs Quantum Dot Intermixing by Controlling Ion Implantation Depth

S Isawa, Y Akashi, R Morita, R Kaneko… - … status solidi (a), 2020 - Wiley Online Library
S Isawa, Y Akashi, R Morita, R Kaneko, H Okada, A Matsumoto, K Akahane, Y Matsushima…
physica status solidi (a), 2020Wiley Online Library
The regional control of the bandgap energies using the highly stacked quantum dot (QD) on
InP (311) B substrate changing ion implantation depths in the process of the quantum dot
intermixing (QDI) technique is investigated. The QDI process involves B+ implantation and
rapid thermal annealing (RTA) around 600° C, in which the ion implantation depths are
controlled regionally with a combination of SiO2 and polymer (AZ) films. Controlled blue
shifts of the photoluminescence (PL) spectra verify the effectiveness of the regionally …
The regional control of the bandgap energies using the highly stacked quantum dot (QD) on InP(311)B substrate changing ion implantation depths in the process of the quantum dot intermixing (QDI) technique is investigated. The QDI process involves B+ implantation and rapid thermal annealing (RTA) around 600 °C, in which the ion implantation depths are controlled regionally with a combination of SiO2 and polymer (AZ) films. Controlled blue shifts of the photoluminescence (PL) spectra verify the effectiveness of the regionally controlled QDI process for application to semiconductor photonic integrated circuits using 1550 nm‐band QD such as integrated wavelength division multiplexing (WDM) light sources.
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