Spectroscopic ellipsometry studies on β-Ga2O3 films and single crystal

T Onuma, S Saito, K Sasaki, T Masui… - Japanese Journal of …, 2016 - iopscience.iop.org
T Onuma, S Saito, K Sasaki, T Masui, T Yamaguchi, T Honda, A Kuramata, M Higashiwaki
Japanese Journal of Applied Physics, 2016iopscience.iop.org
Anisotropic optical properties are investigated on β-Ga 2 O 3 films and a single crystal by
spectroscopic ellipsometry measurements. The $(\bar {2} 01) $ films grown on (0001) α-Al 2
O 3 contain threefold in-plane rotational domains, and the refractive index and absorption
coefficient α obtained by assuming an isotropic material are found to be smaller than those
in the single crystal. By measuring the off-normal transmission ellipsometry spectra of the
(010) β-Ga 2 O 3 substrate, the optical anisotropy in a biaxial crystal as well as the gradual …
Abstract
Anisotropic optical properties are investigated on β-Ga 2 O 3 films and a single crystal by spectroscopic ellipsometry measurements. The films grown on (0001) α-Al 2 O 3 contain threefold in-plane rotational domains, and the refractive index and absorption coefficient α obtained by assuming an isotropic material are found to be smaller than those in the single crystal. By measuring the off-normal transmission ellipsometry spectra of the (010) β-Ga 2 O 3 substrate, the optical anisotropy in a biaxial crystal as well as the gradual increase in α are recognized as origins of the scattering in optically determined bandgap energies.
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