State-of-the-art technologies of gallium oxide power devices

M Higashiwaki, A Kuramata, H Murakami… - Journal of Physics D …, 2017 - iopscience.iop.org
M Higashiwaki, A Kuramata, H Murakami, Y Kumagai
Journal of Physics D: Applied Physics, 2017iopscience.iop.org
Abstract Gallium oxide (Ga $ _ {2} $ O $ _ {3} $) has gained increased attention for power
devices due to its superior material properties and the availability of economical device-
quality native substrates. This review illustrates recent advances in Ga $ _ {2} $ O $ _ {3} $
device technologies, beginning with an overview of the social circumstances that motivate
the development of new-generation switching devices. Following an introduction to the
material properties of Ga $ _ {2} $ O $ _ {3} $ from the viewpoint of power electronics, growth …
Abstract
Gallium oxide (Ga O ) has gained increased attention for power devices due to its superior material properties and the availability of economical device-quality native substrates. This review illustrates recent advances in Ga O device technologies, beginning with an overview of the social circumstances that motivate the development of new-generation switching devices. Following an introduction to the material properties of Ga O from the viewpoint of power electronics, growth technologies of Ga O bulk single crystals and epitaxial thin films are discussed. The fabrication and performance of state-of-the-art Ga O transistors and diodes are then described. We conclude by identifying the directions and challenges of Ga O power device development in the near future.
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