[HTML][HTML] Ultra-thin silicon/electro-optic polymer hybrid waveguide modulators

F Qiu, H Sato, AM Spring, D Maeda, M Ozawa… - Applied Physics …, 2015 - pubs.aip.org
Ultra-thin silicon and electro-optic (EO) polymer hybrid waveguide modulators have been
designed and fabricated. The waveguide consists of a silicon core with a thickness of 30 nm
and a width of 2 μm. The cladding is an EO polymer. Optical mode calculation reveals that
55% of the optical field around the silicon extends into the EO polymer in the TE mode. A
Mach-Zehnder interferometer (MZI) modulator was prepared using common coplanar
electrodes. The measured half-wave voltage of the MZI with 7 μm spacing and 1.3 cm long …
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