光電子分光法による搬送可能な超高真空チャンバー内での金属表面の汚染の評価
小林英一， 田中秀吉 - 表面と真空, 2019 - jstage.jst.go.jp
小林英一， 田中秀吉
表面と真空, 2019•jstage.jst.go.jp抄録 We have carried out a photoelectron spectroscopy investigation of surface
contamination on an aluminum film following transportation using a portable ultrahigh-
vacuum transfer vessel. It was found that oxygen contamination was confined to about one
atomic layer, and both hydroxylation and adsorption of carbon oxide were effectively
suppressed. Although a hydrocarbon signal was detected, this originated from residual gas
in the experimental equipment.
contamination on an aluminum film following transportation using a portable ultrahigh-
vacuum transfer vessel. It was found that oxygen contamination was confined to about one
atomic layer, and both hydroxylation and adsorption of carbon oxide were effectively
suppressed. Although a hydrocarbon signal was detected, this originated from residual gas
in the experimental equipment.
抄録
We have carried out a photoelectron spectroscopy investigation of surface contamination on an aluminum film following transportation using a portable ultrahigh-vacuum transfer vessel. It was found that oxygen contamination was confined to about one atomic layer, and both hydroxylation and adsorption of carbon oxide were effectively suppressed. Although a hydrocarbon signal was detected, this originated from residual gas in the experimental equipment.
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