We report a vector-scanning SQUID microscope for probing a vector magnetic field. We
designed and fabricated a vector [three-dimensional (3-D)] SQUID sensor with the aid of Nb
multilayer fabrication technology. Our vector SQUID sensor on a single chip is composed of
a vector sensor with three orthogonal pick-up coils, which catch the X, Y, and Z magnetic
field components. We improved both the sensitivity and the spatial resolution not only by
reducing the inner diameter but also by increasing the number of pick-up-coil windings …

We designed a vector sensor for sensing magnetic fields by using a 3-dimensional (3D)
scanning superconducting quantum interference device (SQUID) microscope. A vector
sensor consists of three SQUID sensors, which are fabricated on the same chip and each
SQUID sensor has a pick-up coils for X, Y, Z directions. Three coils with readout circuits are
configured in orthogonal with each other to measure the magnetic field vector. We
succeeded in fabricating some SQUIDs sensors with three pick-up coils. The critical current …