Within this paper, we report the first study on the reliability of isolation structures and
surfaces for the gallium oxide material system. Even though insulation by Mg-doping
implantation and diffusion is found to provide a stable electrical isolation at increasing
temperature, a significant thermally-activated leakage flows through surface states. The
vertical bulk material does provide a better stability of the isolation over stress time, but
withstands a lower level of stress compared with the surface and the lateral structure …