Fabrication of nano-gap electrodes for measuring electrical properties of organic molecules using a focused ion beam

Takashi Nagase*, Tohru Kubota, Shinro Mashiko


Molecular electronics, in which a single molecule is used as an element, requires the ability to interface nanometer-sized molecules to macroscopic electronic circuits. For this end, a simple and highly reproducible method to fabricate metallic electrodes with nanometer gaps is proposed. This method consists of the patterning of a metallic mask by focused ion beam (FIB) etching and the pattern transfer to an underlying metallic electrode by dry etching. Metallic electrodes with gaps of 5-8 nm, which are much smaller than the minimum diameter of a FIB, can be reproducibly fabricated using this method. Electrical measurements of the electrodes reveal very good insulating characteristics. These electrodes are expected to be useful for electrically measuring single nolecules.