Molecular-beam apparatus with a spray-jet technique and its applications

Toshiki Yamadab, *, Hidenori Shinoharab, Ge Maofab, Katsumi Kimuraa, Shinro Mashikob aSuper-Molecular Photonics Joint Research Laboralory, National lnstitue for Materials Science, 2268-1 Anagahora, Nagoya 463-0003, Japan
bKansai Advanced Research Center, Communications Research Laboratory, 588-2 Iwaoka, Kobe 651-2942,Japan


We have developed a new molecular beam apparatus that utilizes a spray-jet technique both for a spectroseopic study of neutral non-volatile molecules and a molecular deposition of these molecules. The molecular-beam apparatus consists of (1) a new inlet system with an ultrasonic nebulizer, an inlet chamber and a pulsed nozzle; (2) a set of skimmers; and (3) a high-vacuum chamber equipped with a time-of-flight mass spectrometer (TOFMS) and a substrate introduction unit. In this report, we want to emphasize several unique characteristics and the broad applicability of this molecular-beam apparatus as well as to discuss some experimental results on several typical molecules.