Design of EBIS for nanoprocesses using HCI

Makoto Sakurai, Fumiharu Nakajima, Takunori Fukumoto,
Nobuyuki Nakamura, Shunsuke Ohtani, and Shinro Mashiko

Abstract:
The design of EBIS for nanoprocess using HCI is presented. The EBJS uses commericial super-conducting magnet cooled by a closed-cycle refrigerator.We have made trajectory simulation of electron beam in 100mA range to determine the configuration of electrodes and magnet coils appropriate to obtain high current density beam at the drift tube region.

DOI:10.1088/1742-6596/2/1/007