可搬型超高真空試料搬送導入装置の開発とその応用

Development of a Portable Ultrahigh-Vacuum Sample Transfer Vessel
and Its Application


Eiichi Okbayashi, Shukichi Tanaka, Toshihiro Okajima

Abstract

We have developed a portable ultrahigh-vacuum sample transfer vessel. The size of the vessel is about 55 cm in length, and 5.2 kg in weight. The lowest vacuum pressure achieved by this device was ∼8×10−7 Pa. It is improved by 1/6, compared to the previous device. The transfer vessel was used for analysis of DNA thin film.


doi: 10.3131/jvsj2.60.139