Nano scale Functional Assembly Project：Facilities

National Institute of Information and Communications Technology
Advanced ICT Research Institute

Home
Member
Research
Results
Evevts
Recruit

HOME
Research
Facilities
Reactive Ion Etching System(RIE)

Facilities

【Back to the List】

Reactive Ion Etching System(RIE)

A photograph of Reactive Ion Etching System(RIE)

【To top of this page】

Research Top
Research Task
Collaborations
Facilities
Device
Optics
SPM
Nanostructure Fabrication
Electrical Property Measuring
Analysis
Laboratory
Clean Room
Sythesis Room
Non Vibration Room

Site Map｜ Site Policy
It is prohibited to utilize the contents.
It is allowed to link with this website without notification.
(C)2009 Kobe advanced ICT reserch Center, All rights reserved.